The T value measurement uncertainty caused by the perpendicularity error of the T to the guide rail and the upper and lower chords is perpendicular to the guide rail and the upper and lower apex perpendicular lines. The perpendicularity and measurement of the T to the guide rail and the Z-direction guide are measured. The parallelism of the Z-direction guide rail to the upper and lower tops is calculated. The values ​​are <=2910d and U=218d, respectively, so the angle between the T-direction rail and the upper and lower apex perpendiculars is C=<-U=2612d, and the T-value measurement error caused by the angle error can be pressed. The formula calculates $t4=T@1cos(C 2d)-1=2183@10-4Lm(1) This value is small, and its influence on the measurement uncertainty of T value can be neglected.
According to the specification, the photoelectric collimator (type 702) has a corner error of less than 015d in any one minute, and its half width is $t5=0125d. In the middle, the relationship between the angle deviation and the linear deviation is 1dU01005mm/m [5], so the linear deviation of the photoelectric autocollimator is calculated by the following formula: ht=l$t5=010051000 (2) where ht is the photoelectric autocollimator Linear deviation; l is the span of the plane mirror during the measurement process, which is 450mm during this measurement, so the measurement uncertainty caused by the linear deviation of the photoelectric autocollimator can be calculated as follows: ut5=2@ht/3 =0165Lm(3) The error distribution is considered to be accurately known, so its effective degree of freedom is Mt5y] 21116. The T value caused by the positioning error of the probe measuring frame along the T-direction guide. The measurement head is positioned along the T-direction guide. It is detected and feedback determined by T to the linear grating system. The grating accuracy is $ct6=017Lm, and its half width is $t6=0135Lm. The error distribution is regarded as obeying the inverse sine distribution, so the uncertainty of the T value measurement caused by the positioning error of the probe measuring frame along the T-direction rail can be The following formula calculates ut6=$t6/2=0125Lm(4) whose relative measurement uncertainty is 10, so its effective degree of freedom is Mt6=50.
The uncertainty of the R value measurement caused by the roundness of the mandrel of the tested gear is $cr4=1Lm, and the half width is $r4=015Lm. This error distribution is regarded as an inverse sine distribution. The uncertainty of the R value measurement caused by the mandrel roundness can be calculated as follows: ur4=$r4/2=0135Lm(4) The relative measurement uncertainty is 20, so the effective degree of freedom is Mr4=12.
Measurement environment related parameter parameters Temperature and humidity Air pressure value 20015e [5014@10-4MPa Since the extended uncertainty of the output D is greater than the 0-level precision gear involute profile accumulated in ISO1328[1] (as shown) The total deviation is less than the cumulative total deviation of the involute profile of the gear of class 1 precision, so the measurement uncertainty is in the range of the involute tooth profile measurement of the ultra-precision gear. This measurement center can be used to super-precision gears as specified in the standard ISO1328. Open line profile deviation measurement task.
Conclusion After analyzing and calculating the measurement uncertainty of the improved gear measurement center Mahr891E involute tooth profile deviation measurement system, the Mahr891E can be used as the super precision gear spiral specified in the standard CylindricalGears-ISOSystem of Accuracy and GB/T10095, 1-2001. Line deviation measurement task.
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